Semiconductor industry

Ultrapure water for semiconductor and microelectronics manufacturing

We are specialists in the design, build, installation and maintenance of semiconductor-grade water treatment systems for the highly precise needs of the industry.

We create cost effective, customised solutions to ensure the highest level of water purity required at every stage of semiconductor production from the initial cleaning of wafers to the final fabrication of semiconductor and microelectronics components.

From consultation to commissioning: water management for the semiconductor industry

We are experts in water chemistry and process engineering and understand the unique demands and specifications of the semiconductor and microelectronics industry.

With over 40 years behind us, we have the knowledge and skills to tailor water systems to meet the stringent parameters of ultrapure water required in controlling contamination, facilitating chemical processes and preparing surfaces in semiconductor fabrication.

We have established ourselves as a turnkey partner in the sector, providing consultation, plant and distribution loop design, UK manufacture, installation and commissioning services.

Our solutions are supported by a nationwide team of specialist service engineers dedicated to maintenance, ensuring the integrity and reliability of your pure water supply. We also offer comprehensive service contracts.

Ultrapure water treatment solutions for the semiconductor and microelectronics industry

Semiconductor manufacturing demands ultrapure water – water with a resistivity of 18.2 megaohm-cm at 25°C, free of contaminants and impurities.

We employ advanced technologies such as reverse osmosis (RO), deionisation (DI), ultraviolet sterilisation (UV) and ultrafiltration (UF) to remove ions, particles, TOCs, TDS, oxidants and bacteria to meet the industries ever increasing water standards to prevent the costly rejection of components and manufacturing issues.

Our solutions provide gradations of purity according to ASTM D5127 Standard Guide for Ultrapure Water Used in the Electronics and Semiconductor Industries:

Type	Use
Type E-1	For use in the production of devices having line widths between 0.5 and 1.0 μm.
Type E-1.1	For use in the production of devices having line widths between 0.25 and 0.35 μm.
Type E-1.2	For use in the production of devices having line widths between 0.09 and 0.18 μm.
Type E-1.3	For use in the production of devices having line widths between 0.065 and 0.032 μm.
Type E-2	For use in the production of devices that have dimensions between 1 and 5 μm.
Type E-3	For use in the production of devices having dimensions larger than 5 μm. This grade may be used to produce larger components and some small components not affected by trace amounts of impurities.
Type E-4	For use in the preparation of plating solutions and for other applications where the water being used can be of lesser quality.

Our water treatment solutions

Particulate and sub particulate filtration

We offer high-efficiency particle filters such as submicron or absolute-rated filters to remove fine particles from water.

Reverse Osmosis (RO)

Our cost-effective RO systems are efficient at the removal of a wide range of impurities including ions, organic molecules and particles from feed water and are a critical pre-treatment step before further purification processes.

Continuous Electrodeionisation (CEDI)

This cutting-edge water treatment technology is a continuous and chemical-free process that removes ions and other impurities from water, ensuring precise control of water quality and consistency.

TOC reduction

Our Total Organic Carbon (TOC) reduction solutions eliminate the concentration of organic compounds in water, including substances like organic solvents, surfactants, and other carbon-containing molecules. This ensures the water used in various manufacturing steps, including cleaning, etching and rinsing, is free from organic contaminants that could compromise the performance and reliability of semiconductor devices.

Nitrogen blanketing

Nitrogen blankets not only prevent microorganisms and dust, but are required to maintain the high quality of the water. If the 18.2 megaohm-cm water comes into contact with the O2 or CO2 then the water will absorb the carbon dioxide and oxygen and result in a pH shift as well as reduction in resistivity. It lightly pressurises the space above the water in the tank to make sure there is no ingress of air.

Process water tanks

We supply critical controlled-environment storage tanks for treated water that are constructed to the highest standards and equipped with monitoring and control systems to preserve the water purity and prevent any contamination. Our tanks ensure the stringent quality standards of water for semiconductor fabrication processes.

Process water pumping solutions

Purite’s pump solutions play a crucial role in ensuring the efficient movement and delivery of water throughout various purification and distribution processes, whether moving large volumes of water at low pressure, for precise and controlled flow rates or where high-pressure delivery is needed.

UV sterilisation systems

We have a wide range of devices that provide rapid biological inactivation at the point of install preventing reproduction of microorganisms downstream within your water system, without the need for chemical injection. Our technology harnesses the power of UV radiation at 254 nm for microorganism control and disinfection and UV at 185 nm for total organic carbon (TOC) reduction and the breakdown of organic contaminants.

Ultrafiltration (UF)

This energy efficient, pressure-driven membrane separation process removes suspended or particulate matter from water, as well as bacteria and most viruses. Operating in the range of 0.02 to 0.05 microns, UF is highly effective at removing fine particles and colloidal matter that can cause defects in semiconductor components and acts as a pre-treatment step to reduce fouling in downstream processes.

Water purification cylinders

Our water purification cylinder range and exchange service are a cost effective and easy way to ensure you always have purified water when you need it.

Find out more about our ion exchange cylinders, carbon filtration and cylinder exchange service.

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Our Purite systems are four years old and have run reliably. We have also received a great level of service and technical support and would recommend Purite Water Purification Solutions as an excellent supplier.

Ken Ogden
HRS Technical Manager, ITM Power